ZHU Ke-qin, DAMBRICOURT Pierre, HAO Pen-fei, Zahid Wasif Ali, YIN You-bin. Some microscale effects of gas flows in MEMS[J]. ACTA AERODYNAMICA SINICA, 2008, 26(z1): 87-92.
Citation: ZHU Ke-qin, DAMBRICOURT Pierre, HAO Pen-fei, Zahid Wasif Ali, YIN You-bin. Some microscale effects of gas flows in MEMS[J]. ACTA AERODYNAMICA SINICA, 2008, 26(z1): 87-92.
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Some microscale effects of gas flows in MEMS

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